Interferometric study of reliability of microcantilevers driven by AlN sandwiched between two metal layers

K. Krupa , Christophe Gorecki , R Jóźwicki , Michał Józwik , A. Andrei

Abstract

Micro-electro-mechanical systems are exposed to a variety of environmental stimuli, making a prediction of operational reliability difficult. Here, we investigate environmental effects on properties of piezoelectrically actuated microcantilevers, where aluminum nitride is used as actuation material. The environmental effects to be considered include thermal and humid cycling, as well as harsh electrical loading performed under normal conditions. Investigated properties are defined for the static and dynamic behavior of microcantilevers. A Twyman–Green interferometer, operating in both stroboscopic regime and time-average interferometry mode, is used as a metrology tool. The initial deflection and frequency changes of the first resonance mode of the microcantilevers are monitored during accelerated thermal aging tests, humidity tests, as well as harsh electrical loading and fatigue tests. Finally, the resonant fatigue tests accelerated by application of a high voltage are accomplished to evaluate a lifetime of microcantilevers. Monitoring the micromechanical behaviors of devices driven by aluminum nitride during the lifetime tests assists monitoring of their long-term stability. Finite Element Modeling is used to identify critical areas of stress concentration in the cantilever structure and to further explain various failure mechanisms.
Author K. Krupa
K. Krupa,,
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, Christophe Gorecki
Christophe Gorecki,,
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, R Jóźwicki
R Jóźwicki,,
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, Michał Józwik IMiF
Michał Józwik,,
- The Institute of Micromechanics and Photonics
, A. Andrei
A. Andrei,,
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Journal seriesSensors and Actuators A Physical, ISSN 0924-4247
Issue year2011
Vol171
No2
Pages306-316
Keywords in EnglishMEMS, Microcantilevers, Reliability, Twyman–Green interferometry
DOIDOI:10.1016/j.sna.2011.07.017
URL http://www.sciencedirect.com/science/article/pii/S0924424711004602
Score (nominal)35
Publication indicators WoS Impact Factor: 2011 = 1.802 (2) - 2011=2.009 (5)
Citation count*4 (2015-02-07)
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