Current developments in contactless measurements of high quality materials for microelectronics and nanotechnology employing dielectric resonator techniques

Jerzy Krupka , J Mazierska

Abstract

Progress in Microelectronics and Nanotechnology is determined by advancement in developing and characterization of novel materials. In this paper recent developments in non-destructive measurements of high quality semiconductors, conducting polymers, graphene and metamaterials are presented.
Author Jerzy Krupka (FEIT / MO)
Jerzy Krupka,,
- The Institute of Microelectronics and Optoelectronics
, J Mazierska - [James Cook University, Australia]
J Mazierska,,
-
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Pages739-743
Book Wahidin Wahab (eds.): TENCON 2011 - 2011 IEEE Region 10 Conference, 2011, IEEE, ISBN 978-1-45770255-6, 1438 p.
Keywords in Englishconducting polymers, contactless measurements, dielectric resonators, dielectric resonator techniques, Graphene, high-quality materials, high-quality semiconductors, metamaterials, Microelectronics, monolithic integrated circuits, Nanotechnology, nondestructive measurements, nondestructive testing
DOIDOI:10.1109/TENCON.2011.6129207
Languageen angielski
Score (nominal)10
Publication indicators Scopus Citations = 0; WoS Citations = 0
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