Current developments in contactless measurements of high quality materials for microelectronics and nanotechnology employing dielectric resonator techniques
Jerzy Krupka , J Mazierska
AbstractProgress in Microelectronics and Nanotechnology is determined by advancement in developing and characterization of novel materials. In this paper recent developments in non-destructive measurements of high quality semiconductors, conducting polymers, graphene and metamaterials are presented.
|Book||Wahidin Wahab (eds.): TENCON 2011 - 2011 IEEE Region 10 Conference, 2011, IEEE, ISBN 978-1-45770255-6, 1438 p.|
|Keywords in English||conducting polymers, contactless measurements, dielectric resonators, dielectric resonator techniques, Graphene, high-quality materials, high-quality semiconductors, metamaterials, Microelectronics, monolithic integrated circuits, Nanotechnology, nondestructive measurements, nondestructive testing|
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