Holographic method of topography measurement based on interference of spherical reference and quasi - spherical object beams
Marta Mikuła , Tomasz Kozacki , Michał Józwik , Julianna Kostencka
AbstractThis work presents a holographic measurement method based on interference of two spherical waves. It is devoted to numerical and experimental analysis of the influence of misalignment of imaging and illuminating planes on the accuracy of topography reconstruction of high NA objects.
|Publication size in sheets||0.5|
|Book||Optical Society's: Digital Holography and Three-Dimensional Imaging 2016, 2016, OSA Technical Digest, ISBN 978-1-943580-15-6|
|Keywords in English||Digital holography; height measurements; Instrumentation, measurement, and metrology|
|Score|| = 15.0, 08-02-2017, BookChapterMatConf|
= 15.0, 08-02-2017, BookChapterMatConf
|Citation count*||1 (2018-02-20)|
* presented citation count is obtained through Internet information analysis and it is close to the number calculated by the Publish or Perish system.