Holographic method of topography measurement based on interference of spherical reference and quasi - spherical object beams

Marta Mikuła , Tomasz Kozacki , Michał Józwik , Julianna Kostencka

Abstract

This work presents a holographic measurement method based on interference of two spherical waves. It is devoted to numerical and experimental analysis of the influence of misalignment of imaging and illuminating planes on the accuracy of topography reconstruction of high NA objects.
Author Marta Mikuła IMiF
Marta Mikuła,,
- The Institute of Micromechanics and Photonics
, Tomasz Kozacki IMiF
Tomasz Kozacki,,
- The Institute of Micromechanics and Photonics
, Michał Józwik IMiF
Michał Józwik,,
- The Institute of Micromechanics and Photonics
, Julianna Kostencka IMiF
Julianna Kostencka,,
- The Institute of Micromechanics and Photonics
Pages1-10
Publication size in sheets0.5
Book Optical Society's: Digital Holography and Three-Dimensional Imaging 2016, 2016, OSA Technical Digest, ISBN 978-1-943580-15-6
Keywords in EnglishDigital holography; height measurements; Instrumentation, measurement, and metrology
DOIDOI:10.1364/3D.2016.JW4A.53
URL https://www.osapublishing.org/abstract.cfm?uri=AOMS-2016-JW4A.53
Languageen angielski
Score (nominal)15
ScoreMinisterial score = 15.0, 08-02-2017, BookChapterMatConf
Ministerial score (2013-2016) = 15.0, 08-02-2017, BookChapterMatConf
Citation count*1 (2018-02-20)
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* presented citation count is obtained through Internet information analysis and it is close to the number calculated by the Publish or Perish system.
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