Parallel multifunctional system for MEMS/MOEMS and microoptics testing

Małgorzata Kujawińska , Michał Józwik , Adam Styk

Abstract

In the early chapters of this book, we took a look at the challenges and tools for measuring very large parts and structures. We then looked at medium-sized parts like engines and appliances and finally down to very small-part technologies such as white-light interferometry and microscopy. We now look at an application to some of the smallest parts made today and ones that are expected to play an increasingly important role in the future. The methods described in this chapter derive from the basic tools described in previous chapters but make use of some of the most advanced methods of diffractive optics today to achieve the very precise and difficult measurements.
Author Małgorzata Kujawińska (FM / IMPh)
Małgorzata Kujawińska,,
- The Institute of Micromechanics and Photonics
, Michał Józwik (FM / IMPh)
Michał Józwik,,
- The Institute of Micromechanics and Photonics
, Adam Styk (FM / IMPh)
Adam Styk,,
- The Institute of Micromechanics and Photonics
Pages451-480
Publication size in sheets1.45
Book Kevin Harding: Handbook of Optical Dimensional Metrology, 2013, CRC Press Taylor & Francis Group, ISBN 978-1-4398-5481-5, 492 p.
Languageen angielski
Score (nominal)0
ScoreMinisterial score = 0.0, 11-05-2020, MonographChapterAuthor
Publication indicators Scopus Citations = 1
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