Bipolar transistor in VESTIC technology: prototype

Piotr Konrad Mierzwiński , Wiesław Kuźmicz , Krzysztof Domański , Daniel Tomaszewski , Grzegorz Głuszko

Abstract

VESTIC technology is an alternative for traditional CMOS technology. This paper presents first measurement data of prototypes of VES-BJT: bipolar transistors in VESTIC technology. The VES-BJT is a bipolar transistor on the SOI substrate with symmetric lateral structure and both emitter and collector made of polysilicon. The results indicate that VES-BJT can be a device with useful characteristics. Therefore, VESTIC technology has the potential to become a new BiCMOS-type technology with some unique properties.
Author Piotr Konrad Mierzwiński IMiO
Piotr Konrad Mierzwiński,,
- The Institute of Microelectronics and Optoelectronics
, Wiesław Kuźmicz IMiO
Wiesław Kuźmicz,,
- The Institute of Microelectronics and Optoelectronics
, Krzysztof Domański
Krzysztof Domański,,
-
, Daniel Tomaszewski
Daniel Tomaszewski,,
-
, Grzegorz Głuszko
Grzegorz Głuszko,,
-
Pages1-9
Book Swatowska Barbara, Maziarz Wojciech, Pisarkiewicz Tadeusz, Kucewicz Wojciech (eds.): Proceedings of SPIE Electron Technology Conference 2016, vol. 1, no. 10175, 2016, SPIE, ISBN 9781510608436, 354 p., DOI:10.1117/12.2270351
Keywords in EnglishCMOS technology; Transistors
DOIDOI:10.1117/12.2260787
URL http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2595268
project[PBS1/A3/4/2012_177244] VESTIC – a new manufacturing technology for silicon-based monolithic integrated circuits. Project leader: Kuźmicz Wiesław, , Phone: (+48) 22 234 7146, application date 16-03-2012, start date 01-01-2012, planned end date 30-11-2015, end date 30-09-2017, IMiO/2012/PBS/3, Completed
WEiTI Projects financed by NCRD [Projekty finansowane przez NCBiR (NCBR)]
Languageen angielski
Score (nominal)15
ScoreMinisterial score = 15.0, 27-03-2017, BookChapterMatConfByIndicator
Ministerial score (2013-2016) = 15.0, 27-03-2017, BookChapterMatConfByIndicator
Citation count*0
Additional fields
Numer pracy101750E
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