Fast alignment procedure for MEMS accelerometers

Sergiusz Łuczak

Abstract

A procedure of physical alignment of sensitive axes of various types of microelectromechanical accelerometers (mono-, bi- and tri-axial) is proposed. Owing to the procedure it is possible to align the axes in a relatively short time with a satisfactory accuracy of even hundredths of degree arc. Results of an experimental application of the procedure are illustrated. Special precise instrument simplifying realization of the procedure is presented. The related limitations, advantages and disadvantages are discussed.
Author Sergiusz Łuczak IMiF
Sergiusz Łuczak,,
- The Institute of Micromechanics and Photonics
Pages481-487
Publication size in sheets0.5
Book Jabłoński Ryszard, Brezina Tomas (eds.): Advanced Mechatronics Solutions, Advances in Intelligent Systems and Computing, 2016, Springer, ISBN 978-3-319-23921-7, 668 p., DOI:10.1007/978-3-319-23923-1
Keywords in Englishaccelerometer MEMS tilt alignment sensitive axis
DOIDOI:10.1007/978-3-319-23923-1_70
URL http://link.springer.com/chapter/10.1007/978-3-319-23923-1_70
Languageen angielski
Score (nominal)15
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