Fast alignment procedure for MEMS accelerometers

Sergiusz Łuczak


A procedure of physical alignment of sensitive axes of various types of microelectromechanical accelerometers (mono-, bi- and tri-axial) is proposed. Owing to the procedure it is possible to align the axes in a relatively short time with a satisfactory accuracy of even hundredths of degree arc. Results of an experimental application of the procedure are illustrated. Special precise instrument simplifying realization of the procedure is presented. The related limitations, advantages and disadvantages are discussed.
Author Sergiusz Łuczak (FM / IMPh)
Sergiusz Łuczak,,
- The Institute of Micromechanics and Photonics
Publication size in sheets0.5
Book Jabłoński Ryszard, Březina Tomáš (eds.): Advanced Mechatronics Solutions, Advances in Intelligent Systems and Computing, 2016, Springer, ISBN 978-3-319-23921-7, 668 p., DOI:10.1007/978-3-319-23923-1
Keywords in Englishaccelerometer MEMS tilt alignment sensitive axis
Languageen angielski
Score (nominal)0
Score sourcejournalList
ScoreMinisterial score = 0.0, 01-01-2020, BookChapterSeriesAndMatConfByIndicator
Ministerial score (2013-2016) = 0.0, 01-01-2020, BookChapterSeriesAndMatConfByIndicator
Publication indicators WoS Citations = 4
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