Fast alignment procedure for MEMS accelerometers
AbstractA procedure of physical alignment of sensitive axes of various types of microelectromechanical accelerometers (mono-, bi- and tri-axial) is proposed. Owing to the procedure it is possible to align the axes in a relatively short time with a satisfactory accuracy of even hundredths of degree arc. Results of an experimental application of the procedure are illustrated. Special precise instrument simplifying realization of the procedure is presented. The related limitations, advantages and disadvantages are discussed.
|Publication size in sheets||0.5|
|Book||Jabłoński Ryszard, Březina Tomáš (eds.): Advanced Mechatronics Solutions, Advances in Intelligent Systems and Computing, 2016, Springer, ISBN 978-3-319-23921-7, 668 p., DOI:10.1007/978-3-319-23923-1|
|Keywords in English||accelerometer MEMS tilt alignment sensitive axis|
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