Fabrication and characterization of superhard tungsten boride layers deposited by radio frequency magnetron sputtering

Justyna Chrzanowska , Łukasz Kurpaska , Jacek Hoffman , Zygmunt Szymański , Tomasz Mościcki , Maciej Giżyński

Abstract

The most promising areas of research of new super-hard materials are transition metal borides. These materials are one of the candidates for future superhard layers that will be competitive to DLC and c-BN layers. In this paper MoB-type tungsten boride (WB) layers were examined. WB layers have been deposited by radio frequency magnetron sputtering on Silicon (100), 304 stainless steel (SS 304) and Inconel 601 substrates. Measured thickness of herein prepared layers was about 1 µm, and all studied samples were dense, uniform and smooth. Surface investigation was performed by using an optical profilometer, atomic force microscopy, and scanning electron microscopy. The structure analysis was examined by using X-ray diffractometer (XRD) and transmission electron microscopy (TEM) techniques. Results from the XRD and TEM analysis showed that WB layers were dominated by (101) reflection and indicated a fine grain structure with a grain size of 20–40 nm. The effect of target sputtering power and ambient gas pressure was investigated. The hardness of WB layers deposited on silicon substrate was compared under the load from 1 mN to 5 mN. The hardness of WB layers deposited on SS 304 and Inconel was measured up to 50 mN. All layers of WB revealed excellent hardness exceeding 40 GPa.
Author Justyna Chrzanowska - Institute of Fundamental Technological Research Polish Academy of Sciences (IPPT PAN)
Justyna Chrzanowska,,
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, Łukasz Kurpaska - Narodowe Centrum Badań Jądrowych NCBJ
Łukasz Kurpaska,,
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, Jacek Hoffman
Jacek Hoffman,,
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, Zygmunt Szymański - Institute of Fundamental Technological Research Polish Academy of Sciences (IPPT PAN)
Zygmunt Szymański,,
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, Tomasz Mościcki - Institute of Fundamental Technological Research Polish Academy of Sciences (IPPT PAN)
Tomasz Mościcki,,
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, Maciej Giżyński WIM
Maciej Giżyński,,
- Faculty of Materials Science and Engineering
Journal seriesCeramics International, ISSN 0272-8842
Issue year2016
Vol42
No10
Pages12221-12230
Publication size in sheets0.5
Keywords in PolishBorki; Nanotwardość; rozpylanie magnetronowe; Supertwarde powłoki; Borki wolframu
Keywords in EnglishBorides; Nanohardness; RF magnetron sputtering; Superhard layers; Tungsten boride
DOIDOI:10.1016/j.ceramint.2016.04.166
URL http://dx.doi.org/10.1016/j.ceramint.2016.04.166
Languageen angielski
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Fabrication and characterization of superhard tungsten boride layers deposited by radio frequency magnetron sputtering.pdf 1.73 MB
Score (nominal)40
ScoreMinisterial score [Punktacja MNiSW] = 40.0, 28-11-2017, ArticleFromJournal
Ministerial score (2013-2016) [Punktacja MNiSW (2013-2016)] = 40.0, 28-11-2017, ArticleFromJournal
Publication indicators WoS Impact Factor [Impact Factor WoS]: 2016 = 2.986 (2) - 2016=2.814 (5)
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