Evaluation method for frequency characteristics of linear actuators in the sub-m stroke range using a modified Michelson-type interferometer

Takashi Usuda , Marek Dobosz , Tomizo Kurosawa

Abstract

n/a
Author Takashi Usuda
Takashi Usuda,,
-
, Marek Dobosz IMIB
Marek Dobosz,,
- The Institute of Metrology and Biomedical Engineering
, Tomizo Kurosawa
Tomizo Kurosawa,,
-
Journal seriesNanotechnology, ISSN 0957-4484, 1361-6528
Issue year1998
Vol9
No2
Pages77-84
DOIDOI:10.1088/0957-4484/9/2/007
URL http://iopscience.iop.org/0957-4484/9/2/007
Score (nominal)0
Citation count*6 (2015-03-18)
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