Modification of the Koster interferometer for automatization of gauge block measurements

Leszek Sałbut , Małgorzata Kujawińska , Zbigniew J. Ramotowski

Abstract

Several standard and measures laboratories are using typical Koester interferometers (KI) and routine measurement procedures for evaluating the practical length of block gauges. In the paper the modification of KI by introducing laser light source and phase shifting element for automatization of interferogram analysis by temporal phase shifting method are presented. From phase data obtained the flatness, parallelism and length deviation of gauge block are automatically determined. The methodology and software procedures for this process are introduced and the examples of measurement are shown.
Author Leszek Sałbut IMiF
Leszek Sałbut,,
- The Institute of Micromechanics and Photonics
, Małgorzata Kujawińska IMiF
Małgorzata Kujawińska,,
- The Institute of Micromechanics and Photonics
, Zbigniew J. Ramotowski
Zbigniew J. Ramotowski,,
-
Pages116-122
Book Jennifer E.: Proc. SPIE 3477, Recent Developments in Optical Gauge Block Metrology, 116, 1998, SPIE, [0277-786X]
DOIDOI:10.1117/12.323099
URL http://dx.doi.org/10.1117/12.323099
Languageen angielski
Score (nominal)10
Citation count*11 (2018-06-22)
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