Generation of the derivative of out-of-plane displacements in the high-sensitivity grating interferometry configuration

Krzysztof Patorski , Leszek Sałbut

Abstract

A simple method for determining the surface slope of a specimen under test in the high-sensitivity grating interferometry setup is proposed. The information on the derivative of out-of-plane displacement is obtained by software subtraction of two primary interferograms: a conventional one and one with diffraction orders laterally displaced in the image plane. Very good coincidence between the theoretical and experimental results has been obtained. The method can be used for studying static and transient events depending on the fringe pattern analysis method used.
Author Krzysztof Patorski (FM / IMPh)
Krzysztof Patorski,,
- The Institute of Micromechanics and Photonics
, Leszek Sałbut (FM / IMPh)
Leszek Sałbut,,
- The Institute of Micromechanics and Photonics
Journal seriesOptics and Lasers in Engineering, ISSN 0143-8166
Issue year1997
Vol26
No1
Pages59-70
ASJC Classification2208 Electrical and Electronic Engineering; 2210 Mechanical Engineering; 3107 Atomic and Molecular Physics, and Optics; 2504 Electronic, Optical and Magnetic Materials
DOIDOI:10.1016/0143-8166(95)00085-2
URL http://www.sciencedirect.com/science/article/pii/0143816695000852
Score (nominal)30
Score sourcejournalList
Publication indicators WoS Citations = 1; GS Citations = 3.0; Scopus SNIP (Source Normalised Impact per Paper): 1999 = 0.544; WoS Impact Factor: 2006 = 0.977 (2) - 2007=0.992 (5)
Citation count*3 (2020-09-13)
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