Simultaneous registration of in- and out-of-plane displacements in modified grating interferometry

Joanna Schmit , Krzysztof Patorski , Katherine Creath

Abstract

We recently presented a novel approach using high-sensitivity grating interferometry to measure in- and out-of-plane displacements. The interference of each of the specimen grating diffraction orders with the reference beam was recorded separately but not simultaneously. Computer subtraction and addition of the phase maps obtained from the interferograms yielded the in-plane and out-of-plane displacements (u and w). This article presents our continuing work with this interferometric setup, extending the application of this method to include the simultaneous registration of interferograms for analyzing time dependent events. The spatial separation of interferograms, accomplished by means of polarization techniques, allows for the simultaneous registration of interference patterns. The methods, employing two different sets of linear polarizations for the diffraction orders and two different polarizing beamsplitting elements, are described, and the experimental results are presented. Further modifications for sequential and simultaneous monitoring of all three displacements u,v, and w are suggested.
Author Joanna Schmit
Joanna Schmit,,
-
, Krzysztof Patorski (FM / IMPh)
Krzysztof Patorski,,
- The Institute of Micromechanics and Photonics
, Katherine Creath
Katherine Creath,,
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Journal seriesOptical Engineering, ISSN 0091-3286
Issue year1997
Vol36
No8
Pages2240-2248
ASJC Classification2200 General Engineering; 3107 Atomic and Molecular Physics, and Optics
DOIDOI:10.1117/1.601446
URL http://dx.doi.org/10.1117/1.601446
Score (nominal)20
Score sourcejournalList
Publication indicators WoS Citations = 9; GS Citations = 9.0; Scopus SNIP (Source Normalised Impact per Paper): 1999 = 0.81; WoS Impact Factor: 2006 = 0.897 (2) - 2007=0.939 (5)
Citation count*9 (2020-09-13)
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