Development of an experimental technique for testing rheological properties of ultrathin polymer films used in nanoimprint lithography

Dariusz M. Jarzabek , Zygmunt Rymuza , Akira Horiba , Yoshihiko Hirai

Abstract

A new method for the measurement of rheological properties (complex viscosity, viscosity and elasticity) of thin polymeric films is presented. The probe, which is placed on the end of an arm of a mini tuning fork, is caused to oscillate and then is put into poly(methyl methacrylate) films, whose thickness ranges from 30 nm to 1080 nm. All measured properties depend on temperature, thickness of the films, indentation depth and the molecular weight of PMMA. Complex viscosity, viscosity and elasticity are found to be lower at higher temperatures and higher with greater molecular weight. They are also lower for thicker films. The results gained from this experiment may be useful in the development of nanoimprint lithography and many other branches of nanotechnology. Furthermore, the method allows for the measurement of the rheological properties of many different thin films (nanoimprint polymers, oils, lubricants) at different temperatures.
Author Dariusz M. Jarzabek
Dariusz M. Jarzabek,,
-
, Zygmunt Rymuza IMiF
Zygmunt Rymuza,,
- The Institute of Micromechanics and Photonics
, Akira Horiba
Akira Horiba,,
-
, Yoshihiko Hirai
Yoshihiko Hirai,,
-
Journal seriesJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, ISSN 1071-1023
Issue year2011
Vol29
No6
Pages061603-061603-6
Keywords in Englishelasticity, indentation, mechanical variables measurement, nanolithography, polymer films, rheology, soft lithography, viscosity
DOIDOI:10.1116/1.3656377
Score (nominal)25
Publication indicators WoS Impact Factor: 2011 = 1.341 (2) - 2011=1.355 (5)
Citation count*3 (2015-03-08)
Cite
Share Share



* presented citation count is obtained through Internet information analysis and it is close to the number calculated by the Publish or Perish system.
Back