Elimination of the channel current effect on the characterization of MOSFET threshold voltage using junction capacitance measurements

Daniel Tomaszewski , Grzegorz Głuszko , Lidia Łukasiak , Krzysztof Kucharski , Jolanta Malesińska


An alternative method for an extraction of the MOSFET threshold voltage has been proposed. It is based on an analysis of the MOSFET source-bulk junction capacitance behavior as a function of the gate-source voltage. The effect of the channel current on the threshold voltage extraction is fully eliminated. For the threshold voltage and junction capacitance model parameters non-iterative methods have been used. The proposed method has been demonstrated using a series of MOS transistors manufactured using a standard CMOS technology.
Author Daniel Tomaszewski
Daniel Tomaszewski,,
, Grzegorz Głuszko
Grzegorz Głuszko,,
, Lidia Łukasiak IMiO
Lidia Łukasiak,,
- The Institute of Microelectronics and Optoelectronics
, Krzysztof Kucharski
Krzysztof Kucharski,,
, Jolanta Malesińska
Jolanta Malesińska,,
Journal seriesSolid-State Electronics, ISSN 0038-1101
Issue year2017
Publication size in sheets0.5
ConferenceJoint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS 2016), 25-01-2016 - 27-01-2016, Vienna, Austria
Keywords in EnglishMOSFET; CMOS; Threshold voltage; Junction capacitance; Parameter extraction
URL http://www.sciencedirect.com/science/article/pii/S0038110116301691
projectThe Development of Design, Processing and Testing Methods of the Electronic Devices and Materials for Microelectronics and Optoelectronics. Project leader: Szczepański Paweł, , Phone: (48 22) 234 58 70, start date 01-01-2015, planned end date 31-12-2015, end date 31-05-2016, IMiO/2015/STATUT/1, Implemented
WEiTI Działalność statutowa
Languageen angielski
Score (nominal)25
ScoreMinisterial score = 20.0, 27-03-2017, ArticleFromJournalAndMatConf
Ministerial score (2013-2016) = 25.0, 27-03-2017, ArticleFromJournalAndMatConf
Publication indicators WoS Impact Factor: 2016 = 1.58 (2) - 2016=1.59 (5)
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* presented citation count is obtained through Internet information analysis and it is close to the number calculated by the Publish or Perish system.