Wafer-scale graphene quality assessment using micro four-point probe mapping

David M A MacKenzie , Kristoffer G Kalhauge , Patrick R Whelan , Frederik W Stergaard , Iwona Pasternak , Włodzimierz Strupiński , Peter Bøggild , Peter U Jepsen , Dirch H Petersen

Abstract

Micro four-point probes (M4PP) provide rapid and automated lithography-free transport properties of planar surfaces including two-dimensional materials. We perform sheet conductance wafer maps of graphene directly grown on a 100 mm diameter SiC wafer using a multiplexed seven-point probe with minor additional measurement time compared to a four-point probe. Comparing the results of three subprobes we find that compared to a single-probe result, our measurement yield increases from 72%-84% to 97%. The additional data allows for correlation analysis between adjacent subprobes, that must measure the same values in case the sample is uniform on the scale of the electrode pitch. We observe that the relative difference in measured sheet conductance between two adjacent subprobes increase in the transition between large and low conductance regions. We mapped sheet conductance of graphene as it changed over several weeks. Terahertz time-domain spectroscopy conductivity maps both before and after M4PP mapping showed no significant change due to M4PP measurement, with both methods showing the same qualitative changes over time.

Author David M A MacKenzie - [Danmarks Tekniske Universitet]
David M A MacKenzie,,
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, Kristoffer G Kalhauge - [Danmarks Tekniske Universitet]
Kristoffer G Kalhauge,,
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, Patrick R Whelan - [Danmarks Tekniske Universitet]
Patrick R Whelan,,
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, Frederik W Stergaard - [Danmarks Tekniske Universitet]
Frederik W Stergaard,,
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, Iwona Pasternak (FP / SRD)
Iwona Pasternak,,
- Structural Research Division
, Włodzimierz Strupiński (FP / SRD)
Włodzimierz Strupiński,,
- Structural Research Division
, Peter Bøggild - [Danmarks Tekniske Universitet]
Peter Bøggild,,
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, Peter U Jepsen - [Danmarks Tekniske Universitet]
Peter U Jepsen,,
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, Dirch H Petersen - [Danmarks Tekniske Universitet]
Dirch H Petersen,,
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Journal seriesNanotechnology, ISSN 0957-4484, e-ISSN 1361-6528
Issue year2020
Vol31
ASJC Classification1502 Bioengineering; 1600 General Chemistry; 2208 Electrical and Electronic Engineering; 2210 Mechanical Engineering; 2211 Mechanics of Materials; 2500 General Materials Science
DOIDOI:10.1088/1361-6528/ab7677
Languageen angielski
Score (nominal)100
Score sourcejournalList
ScoreMinisterial score = 100.0, 02-09-2020, ArticleFromJournal
Publication indicators Scopus Citations = 0; WoS Citations = 0; Scopus SNIP (Source Normalised Impact per Paper): 2017 = 0.788; WoS Impact Factor: 2018 = 3.399 (2) - 2018=3.403 (5)
Citation count*1 (2020-09-13)
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* presented citation count is obtained through Internet information analysis and it is close to the number calculated by the Publish or Perish system.
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