Advantages of Using Piezoelectric Materials in the MEMS Construction on the Example of AlN and Sc Doped AlN Layers
Magdalena Ekwińska , Jerzy Zając , Dariusz Szmigiel , Michał Zaborowski , Cezariusz Jastrzębski , George Muscalu , Bogdan Firtat , Silvian Dinulescu , Adrian Anghelescu , Carmen Moldovan
Abstract
n/a| Author | |
| Pages | 265-273 |
| Publication size in sheets | 0.5 |
| Book | Szewczyk Roman, Krejsa Jiří, Nowicki Michał, Ostaszewska-Liżewska Anna (eds.): Mechatronics 2019: Recent Advances Towards Industry 4.0, Advances in Intelligent Systems and Computing, vol. 1044, 2020, Springer, ISBN 978-3-030-29992-7, [978-3-030-29993-4], 515 p., DOI:10.1007/978-3-030-29993-4 |
| DOI | DOI:10.1007/978-3-030-29993-4_33 |
| Language | en angielski |
| Score (nominal) | 20 |
| Score source | publisherList |
| Score | = 20.0, 10-01-2020, MonographChapterAuthor |
| Publication indicators | = 0 |
| Citation count* |
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* presented citation count is obtained through Internet information analysis and it is close to the number calculated by the Publish or Perish system.
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