Advantages of Using Piezoelectric Materials in the MEMS Construction on the Example of AlN and Sc Doped AlN Layers

Ekwińska, Magdalena; Zając, Jerzy; Szmigiel, Dariusz; Zaborowski, Michał; Jastrzębski, Cezariusz; Muscalu, George; Firtat, Bogdan; Dinulescu, Silvian; Anghelescu, Adrian; Moldovan, Carmen

doi:10.1007/978-3-030-29993-4_33

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Advantages of Using Piezoelectric Materials in the MEMS Construction on the Example of AlN and Sc Doped AlN Layers

Authors:

Magdalena Ekwińska,
Jerzy Zając,
Dariusz Szmigiel,
Michał Zaborowski,
Cezariusz Jastrzębski,
George Muscalu,
Bogdan Firtat,
Silvian Dinulescu,
Adrian Anghelescu,
Carmen Moldovan

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Record ID: WUT0a14374f48ce4b408060f183f9202e6f
Author: Magdalena Ekwińska Magdalena Ekwińska,, The Institute of Micromechanics and Photonics (FM/IMPh)Faculty of Mechatronics (FM)Author's external affiliation: Sieć Badawcza Łukasiewicz – Instytut Mikroelektroniki i Fotoniki
Jerzy Zając Jerzy Zając,, External affiliation of publication: Institute of Electron Technology
Dariusz Szmigiel Dariusz Szmigiel,, External affiliation of publication: Institute of Electron Technology
Michał Zaborowski Michał Zaborowski,, External affiliation of publication: Institute of Electron Technology
Cezariusz Jastrzębski Cezariusz Jastrzębski,, Structural Research Division (FP/SRD)Faculty of Physics (FP)
George Muscalu George Muscalu,, External affiliation of publication: National Institute for Research and Development in Microtechnologies Romania
Bogdan Firtat Bogdan Firtat,, External affiliation of publication: National Institute for Research and Development in Microtechnologies Romania
Silvian Dinulescu Silvian Dinulescu,, External affiliation of publication: National Institute for Research and Development in Microtechnologies Romania
Adrian Anghelescu Adrian Anghelescu,, External affiliation of publication: National Institute for Research and Development in Microtechnologies Romania
Carmen Moldovan Carmen Moldovan,, External affiliation of publication: National Institute for Research and Development in Microtechnologies Romania
Pages: 265-273
Publication size in sheets: 0.50
Book: Szewczyk Roman*, Roman Szewczyk,, The Institute of Metrology and Biomedical Engineering (FM/IMBE)Faculty of Mechatronics (FM)External affiliation of publication: Łukasiewicz Research Network – Industrial Research Institute for Automation and Measurements PIAP Krejsa Jiří, Jiří Krejsa,, Author's external affiliation: Faculty of Mechanical Engineering Nowicki Michał Michał Nowicki,, The Institute of Metrology and Biomedical Engineering (FM/IMBE)Faculty of Mechatronics (FM) [et al.] (eds.): Mechatronics 2019: Recent Advances Towards Industry 4.0, Advances in Intelligent Systems and Computing, vol. 1044, 2020, Springer, 515 p., ISBN 978-3-030-29992-7. DOI:10.1007/978-3-030-29993-4 Opening in a new tab
DOI: DOI:10.1007/978-3-030-29993-4_33 Opening in a new tab
Language: (en) English
Score (nominal): 20
Score source: publisherList
Score: Ministerial score = 20.0, 05-05-2022, ChapterFromConference
Publication indicators: Scopus Citations = 0

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Uniform Resource Identifier: https://repo.pw.edu.pl/info/article/WUT0a14374f48ce4b408060f183f9202e6f/

URN: urn:pw-repo:WUT0a14374f48ce4b408060f183f9202e6f

* presented citation count is obtained through Internet information analysis and it is close to the number calculated by the Publish or PerishOpening in a new tab system.

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Advantages of Using Piezoelectric Materials in the MEMS Construction on the Example of AlN and Sc Doped AlN Layers

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