Advantages of Using Piezoelectric Materials in the MEMS Construction on the Example of AlN and Sc Doped AlN Layers

Magdalena Ekwińska , Jerzy Zając , Dariusz Szmigiel , Michał Zaborowski , Cezariusz Jastrzębski , George Muscalu , Bogdan Firtat , Silvian Dinulescu , Adrian Anghelescu , Carmen Moldovan

Abstract

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Author Magdalena Ekwińska - [Instytut Technologii Elektronowej]
Magdalena Ekwińska,,
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, Jerzy Zając - [Instytut Technologii Elektronowej]
Jerzy Zając,,
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, Dariusz Szmigiel - [Instytut Technologii Elektronowej]
Dariusz Szmigiel,,
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, Michał Zaborowski - [Instytut Technologii Elektronowej]
Michał Zaborowski,,
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, Cezariusz Jastrzębski (FP / SRD)
Cezariusz Jastrzębski,,
- Structural Research Division
, George Muscalu - [National Institute for Research and Development in Microtechnologies Romania]
George Muscalu,,
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, Bogdan Firtat - [National Institute for Research and Development in Microtechnologies Romania]
Bogdan Firtat,,
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, Silvian Dinulescu - [National Institute for Research and Development in Microtechnologies Romania]
Silvian Dinulescu,,
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, Adrian Anghelescu - [National Institute for Research and Development in Microtechnologies Romania]
Adrian Anghelescu,,
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, Carmen Moldovan - [National Institute for Research and Development in Microtechnologies Romania]
Carmen Moldovan,,
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Pages265-273
Publication size in sheets0.5
Book Szewczyk Roman, Krejsa Jiří, Nowicki Michał, Ostaszewska-Liżewska Anna (eds.): Mechatronics 2019: Recent Advances Towards Industry 4.0, Advances in Intelligent Systems and Computing, vol. 1044, 2020, Springer, ISBN 978-3-030-29992-7, [978-3-030-29993-4], 515 p., DOI:10.1007/978-3-030-29993-4
DOIDOI:10.1007/978-3-030-29993-4_33
Languageen angielski
Score (nominal)20
Score sourcepublisherList
ScoreMinisterial score = 20.0, 10-01-2020, MonographChapterAuthor
Publication indicators Scopus Citations = 0
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