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Advantages of Using Piezoelectric Materials in the MEMS Construction on the Example of AlN and Sc Doped AlN Layers
Authors:
- Magdalena Ekwińska,
- Jerzy Zając,
- Dariusz Szmigiel,
- Michał Zaborowski,
- Cezariusz Jastrzębski,
- George Muscalu,
- Bogdan Firtat,
- Silvian Dinulescu,
- Adrian Anghelescu,
- Carmen Moldovan
- Record ID
- WUT0a14374f48ce4b408060f183f9202e6f
- Author
- Pages
- 265-273
- Publication size in sheets
- 0.50
- Book
- Szewczyk Roman*, Roman Szewczyk Krejsa Jiří, Jiří Krejsa Nowicki Michał Michał Nowicki [et al.] (eds.): Mechatronics 2019: Recent Advances Towards Industry 4.0, Advances in Intelligent Systems and Computing, vol. 1044, 2020, Springer, 515 p., ISBN 978-3-030-29992-7. DOI:10.1007/978-3-030-29993-4 Opening in a new tab
- DOI
- DOI:10.1007/978-3-030-29993-4_33 Opening in a new tab
- Language
- (en) English
- Score (nominal)
- 20
- Score source
- publisherList
- Score
- = 20.0, 05-05-2022, ChapterFromConference
- Publication indicators
- = 0
- Uniform Resource Identifier
- https://repo.pw.edu.pl/info/article/WUT0a14374f48ce4b408060f183f9202e6f/
- URN
urn:pw-repo:WUT0a14374f48ce4b408060f183f9202e6f
* presented citation count is obtained through Internet information analysis and it is close to the number calculated by the Publish or PerishOpening in a new tab system.