The application of magnetic self-filter to optimization of AlN film growth process during the impulse plasma deposition synthesis

Rafał Chodun , Katarzyna Nowakowska-Langier , Sebastian Okrasa , Krzysztof Zdunek

Abstract

This work presents the very first results of the application of plasma magnetic filtering achieved by a coil coupled with an electrical circuit of a coaxial accelerator during the synthesis of A1N thin films by use of Impulse Plasma Deposition method (IPD). The uniqueness of this technical solution lies in the fact that the filter is not supplied, controlled and synchronized from any external device. Our solution uses the energy from the electrical circuit of plasma accelerator. The plasma state was described on the basis of OES studies. Estimation of the effects of plasma filtering on the film quality was carried out on the basis of characterization of structure morphology (SEM), phase and chemical composition (vibrational spectroscopy). Our work has shown that the use of the developed magnetic self-filter improved the structure of the AlN coatings synthesized under the condition of impulse plasma, especially by the minimization of the tendency to deposit metallic aluminum droplets and columnar growth.
Author Rafał Chodun (FMSE / DSE)
Rafał Chodun,,
- Division of Surface Engineering
, Katarzyna Nowakowska-Langier - National Center for Nuclear Research (NCBJ) [National Center for Nuclear Research (NCBJ)]
Katarzyna Nowakowska-Langier,,
-
- Narodowe Centrum Badań Jądrowych w Otwocku
, Sebastian Okrasa (FMSE / DSE)
Sebastian Okrasa,,
- Division of Surface Engineering
, Krzysztof Zdunek (FMSE / DSE)
Krzysztof Zdunek,,
- Division of Surface Engineering
Journal seriesMaterials Science-Poland, ISSN 2083-1331, [2083-134X, 0137-1339]
Issue year2016
Vol34
No1
Pages126-131
Publication size in sheets0.5
Keywords in EnglishIPD method; magnetic filter; nanocrystalline films; thin films
ASJC Classification2210 Mechanical Engineering; 2211 Mechanics of Materials; 3104 Condensed Matter Physics; 2500 General Materials Science
DOIDOI:10.1515/msp-2016-0007
URL https://www.degruyter.com/view/j/msp.2016.34.issue-1/msp-2016-0007/msp-2016-0007.xml?rskey=ft7iiC&result=3
Languageen angielski
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pplication of magnetic self-filter to optimization of AIN film growth process during the impulse plasma deposition synthesis.pdf 4.29 MB
Score (nominal)15
Score sourcejournalList
ScoreMinisterial score = 15.0, 12-07-2020, ArticleFromJournal
Ministerial score (2013-2016) = 15.0, 12-07-2020, ArticleFromJournal
Publication indicators Scopus Citations = 1; WoS Citations = 1; Scopus SNIP (Source Normalised Impact per Paper): 2016 = 0.477; WoS Impact Factor: 2017 = 0.854 (2) - 2017=0.794 (5)
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