Radical flux modeling and analysis for sticking coefficient evaluation
Arkadiusz Malinowski , M Hori , M Sekine , K Ishikawa , H Kondo , H Yamamoto , T. Takeuchi , T. Suzuki , Andrzej Jakubowski , Lidia Łukasiak
|Book||Hori M: 3rd Int. Symp. on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials ISPlasma2011, 2011, Nagoya Institute of Technology|
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